About: http://webisa.webdatacommons.org/166362982

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates generally to pressure sensors, and more particularly to pressure sensors suitable for use at high operating temperatures and employing silicon-on-insulator (SOI) architecture.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com