About: http://webisa.webdatacommons.org/166373289

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The time per cycle will vary depending on substrate or chamber size and other hardware parameters, on chamber conditions such as temperature and pressure and on the selection of precursor and reactive gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com