About: http://webisa.webdatacommons.org/166383844

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process starts at step 201 with a blank quartz photomask, coated with masking film, such as chrome, MoSi, carbon, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com