About: http://webisa.webdatacommons.org/166384612

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The entire bonded wafer was heated or cooled, whereby the porous Si layers were broken owing to expansion or other causes to allow the wafer to separate into three sheets with the porous Si layers exposed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com