About: http://webisa.webdatacommons.org/166399808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The underlying insulating layer 12 may be etched independently by a plasma etch including CF4 and CHF3 as reactive agents.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com