About: http://webisa.webdatacommons.org/166512978

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 14, wherein said fourth insulating layer is a material having a low-dielectric constant between about 2 and 4, and is deposited to a thickness of between about 5000 and 12000 Angstroms.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es