About: http://webisa.webdatacommons.org/166518478

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These two passageways have the structure that forms a mixing passageway 11 by joining in a manner such as shown in FIG. 3, thereby exhausting the CVD material and the carrier gas to the vaporizing chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com