About: http://webisa.webdatacommons.org/166565528

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The oxygen partial pressure of the annealing atmosphere is preferably set to 10???9 Pa or more, especially 10???9 to 1 Pa.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com