About: http://webisa.webdatacommons.org/166567485

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electrodes 6, 8 may be deposited on the upper and lower surfaces of the piezoelectric membrane 2, respectively, by using various methods such as vacuum deposition, mask etching, painting, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com