About: http://webisa.webdatacommons.org/166606247

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The region having the same n-type impurity concentration profile is formed in an area, particularly in an area deeper than the thickness of the SDE region formed before the source/drain regions are formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca