About: http://webisa.webdatacommons.org/166763703

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the object such as a semiconductor wafer, is engaged with the chuck, the nozzle is closely adjacent the flat surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au