About: http://webisa.webdatacommons.org/166775912

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates, in general, to movement sensors detecting pressure, temperature, and acceleration, such as accelerometers, and more specifically, to mechanical sensors using semiconductor material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com