About: http://webisa.webdatacommons.org/166779724

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma resistive layer 202 deposited on the substrate surface 140 may have a thickness between 1 ??m and about 500 ??m, for example, about 1 ??m and about 100 ??m, such as about 2 ??m and about 30 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com