About: http://webisa.webdatacommons.org/166811539

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to the field of semiconductor wafer processing, and in particular to a method and apparatus for controlling the reaction chamber pressure in semiconductor wafer processing equipment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com