About: http://webisa.webdatacommons.org/166869643

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This barrier film 305 is formed by a material such as for example Ta, Ti, TaN, or TiNby the well known sputtering process.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com