| http://www.w3.org/ns/prov#value | - The method of claim 2 further characterized in that:the radio-frequency plasma is produced by parallel first and second electrodes, the first electrode being connected to a radio-frequency power source, the second electrode being grounded, and the substrate is supported on one of the electrodes, and the inhibiting gas is a gas that strongly adsorbs to the substrate. 7.
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