About: http://webisa.webdatacommons.org/166948920

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The layer 112 may be doped with phosphorus, boron, or other materials and may be formed by high density plasma deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com