About: http://webisa.webdatacommons.org/167029246

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the sacrificial layer 64 is etched away from the growth substrate 62 with a suitable etchant, such as hydrofluoric acid, the planarizing sacrificial layer 104 is also removed by the hydrochloric acid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com