About: http://webisa.webdatacommons.org/167064221

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The buffer layer 113 may include an insulating material such as silicon oxide (SiO2), silicon nitride (SiNx), for example, and the substrate 111 may include a metal material that can be easily etched away.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com