About: http://webisa.webdatacommons.org/167366359

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Semiconductor materials such as mono and polycrystalline silicon, and semiconductor mass production fabrication techniques have been used to produce micromechanical accelerometers, as in U.S. Pat. No. 4,483,194.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es