About: http://webisa.webdatacommons.org/167487039

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIGS. 3A and 3B, armophous silicon or polycrystalline silicon is deposited on a transparent substrate such as glass and patterned by a typical photo lithographic process to form an active region 22.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com