About: http://webisa.webdatacommons.org/16763538

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, a silicon nitride layer is provided on the resulting structure for example formed by CVD, or other suitable deposition or growth process, to a depth on the order of approximately 500 to 700 Angstroms.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com