About: http://webisa.webdatacommons.org/167784024

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such processes can be used as part of an atomic layer deposition (ALD) process, a metal
http://www.w3.org/ns/prov#wasQuotedFrom	google.com