About: http://webisa.webdatacommons.org/167842865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Suitable materials for substrate 27 have high transparency or transmissivity for soft X-rays and can be formed of materials such as Be, B4 C, organic polymers or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com