PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Our MEMS and thin film processes are designed to handle silicon wafer substrates, as well as a variety of other material such as quartz, glass and aluminum nitride wafers.
http://www.w3.org/ns/prov#wasQuotedFrom
  • memsjournal.com