About: http://webisa.webdatacommons.org/168186445

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a graph showing the increasing chamber surface temperature for increasing vapor partial pressure in the vapor chamber adjoining the process chamber;
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk