About: http://webisa.webdatacommons.org/16832859

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Initially, the substrate, for example a silicon wafer, is coated with a positive photoresist composition in the desired layer thickness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com