About: http://webisa.webdatacommons.org/16836287

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, a nitrogen source, such as ammonia (NH3) or nitrogen gas (N2) can be supplied to the substrate to break surface bonds and create Si???N bonds, depending on the nature of the subsequent deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com