About: http://webisa.webdatacommons.org/168456303

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	(5) Since the active layers are covered with such an insulating layer as a silicon oxide film, it is possible to avoid problems arising from contamination and surface damages which may otherwise occur when implanting impurity ions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com