| http://www.w3.org/ns/prov#value | - In addition, conducting substrates such as a single crystal silicon substrate, a copper substrate, substrates made from high melting point metallic elements such as Ta, W, Mo, Ti, and Cr, and alloys and compounds containing these metallic elements (for example, nitrogen alloys such as tantalum nitride, or silicide materials such as tungsten silicide) can be used as the substrate 10.
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