About: http://webisa.webdatacommons.org/168597093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a cross section schematically illustrating the essential part of one example of the wafer polishing apparatus according to this invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au