About: http://webisa.webdatacommons.org/168634181

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a vertical cross sectional view of a substrate processing apparatus 1b according to a third preferred embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com