About: http://webisa.webdatacommons.org/168648150

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sidewall portions 20a, 20b, 20c and 20d and floor 21 are covered with a gate dielectric 22 formed of an insulating material such as silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com