About: http://webisa.webdatacommons.org/168694365

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since device fabrication may involve as many as 30 layers, it is particularly important to measure the overlay of the critical layers to each other.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com