About: http://webisa.webdatacommons.org/16879759

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this particular preferred embodiment, the step (c) is performed substantially in a vacuum or in an atmosphere including an inert gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com