About: http://webisa.webdatacommons.org/168825436

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon nitride is especially advantageous in this application because it is desirable to use a dielectric material which may be etched at the same rate as the metal which is used to fill the vias and the corresponding oxide layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr