About: http://webisa.webdatacommons.org/168932226

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is an example of a dual gate pattern that includes thick and minute patterns, which is expectedly fabricated from an object to be exposed by using the exposure apparatus shown in FIG. 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com