About: http://webisa.webdatacommons.org/168938659

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since the entire batch of background wafers 36 are simultaneously neutralized, this exemplary embodiment is particularly advantageous for systems requiring a relatively high process throughput.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com