About: http://webisa.webdatacommons.org/16941203

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Inc.Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpiecesUS701951231 Ago 200428 Mar 2006Micron Technology, Inc.Planarity diagnostic system, e.g., for microelectronic component test systemsUS704096518 Sep 20039 May 2006Micron Technology,
http://www.w3.org/ns/prov#wasQuotedFrom	google.es