About: http://webisa.webdatacommons.org/169499884

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1 a CVD apparatus 10 includes an enclosure assembly 12 formed from a process-compatible material, such as aluminum or anodized aluminum.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com