About: http://webisa.webdatacommons.org/1695258

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need to minimize the effect of material sputtered from the wafer surface, which is deposited on the walls and window of the reactor.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com