About: http://webisa.webdatacommons.org/169811370

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Reference numeral 16 denotes an interlayer insulating film formed of with a single layer or a stack of an inorganic material, such as silicon oxide, silicon nitride, silicon nitride oxide, aluminum nitride, and/or aluminum nitride oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com