About: http://webisa.webdatacommons.org/169874485

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Generally, such devices can use a low-powered RF plasma to make oxygen radicals from air that then oxidize and chemically etch away hydrocarbons (e.g., from the interior surfaces of an SEM and/or samples, probes and other items therein).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com