About: http://webisa.webdatacommons.org/169944158

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the reaction sufficiently progresses in depositing the Ti layer, heating or annealing is not particularly required.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com