About: http://webisa.webdatacommons.org/169944164

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After the usual prebake cycle, a pattern such as shown in FIG. 1 is exposed through a photo resist mask and developed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au