About: http://webisa.webdatacommons.org/169982971

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	forming a pattern of a wiring groove in an area of the second chemically amplified resist film including the via hole;
http://www.w3.org/ns/prov#wasQuotedFrom	google.es