About: http://webisa.webdatacommons.org/170143217

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, decreasing the amount of foreign substances is an important problem for stabilizing the semiconductor production process or improving the yield.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com