About: http://webisa.webdatacommons.org/170316408

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The above described fabs, modules, tools, and chambers constitute examples of the different functional units within a typical wafer manufacturing facility.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com