About: http://webisa.webdatacommons.org/170391773

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein the product is a semi-conductor wafer and the manufacturing process is an automated semi-conductor manufacturing process. 5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com