About: http://webisa.webdatacommons.org/170527237

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interlayer insulating film 57 is made of an organic insulating material such as a polyimide or SOG having a dielectric constant of as low as 4 or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com